Simulative Study on Vaporization Condition of OMCTS by COMSOL forSiO2 Clean Production

Simulative Study on Vaporization Condition of OMCTS by COMSOL forSiO2 Clean Production
제목
Simulative Study on Vaporization Condition of OMCTS by COMSOL forSiO2 Clean Production
제목 (타언어)
Simulative Study on Vaporization Condition of OMCTS by COMSOL forSiO2 Clean Production
저자
An sung jin
발행일
2017-04-19
학회명
2017 Materials Research Society Spring
개최지
미국 피닉스
개최국가
미국