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The dependence of N2 carrier gas flow rate on deposition rate and density changes of porous silica preform synthesized by eco-friendly octamethyltetracyclosiloxane

The dependence of N2 carrier gas flow rate on deposition rate and density changes of porous silica preform synthesized by eco-friendly octamethyltetracyclosiloxane
제목
The dependence of N2 carrier gas flow rate on deposition rate and density changes of porous silica preform synthesized by eco-friendly octamethyltetracyclosiloxane
제목 (타언어)
The dependence of N2 carrier gas flow rate on deposition rate and density changes of porous silica preform synthesized by eco-friendly octamethyltetracyclosiloxane
저자
An, sung jin
발행일
2019-06
저널명
physica status solidi (a) - applications and materials science
권
19
호
1900289
페이지
1 ~ 5

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